Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at the Nanometer Scale Using Focused Electron Beam-Induced Deposition

Mason, Nigel J.Pintea, MariaCsarnovics, IstvánFodor, TamásSzikszai, ZitaKertész, Zsófia2023-07-112023-07-112023ACS Omega. -8 : 27 (2023), p. 24233-24246. -ACS Omega. - 2470-1343. - 2470-13432470-1343https://hdl.handle.net/2437/357415Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at the Nanometer Scale Using Focused Electron Beam-Induced Depositionfolyóiratcikkopen access articlehttps://ebib.lib.unideb.hu/ebib/CorvinaWeb?action=cclfind&resultview=long&ccltext=idno+BIBFORM113282TermészettudományokFizikai tudományokhttps://pubs.acs.org/doi/10.1021/acsomega.3c00793http://dx.doi.org/10.1021/acsomega.3c007932023-07-1100101899040000185164928602