Functionalization of microfluidic devices by microstructures created with proton beam lithography

Nady, EmadNagy, GyulaHuszánk, Róbert2022-02-112022-02-112021Vacuum. -190 (2021), p. 1-9. -(cikkazonosító)110295. -Vacuum. - 0042-207X0042-207Xhttp://hdl.handle.net/2437/328580Functionalization of microfluidic devices by microstructures created with proton beam lithographyfolyóiratcikkopen access articlehttp://webpac.lib.unideb.hu:8082/ebib/CorvinaWeb?action=cclfind&resultview=long&ccltext=idno+BIBFORM100272TermészettudományokFizikai tudományokhttps://linkinghub.elsevier.com/retrieve/pii/S0042207X21002499http://dx.doi.org/10.1016/j.vacuum.2021.1102952022-02-1700067040170000585105596287