Optical and Morphological Characterization of Nanoscale Oxides Grown in Low-Energy H+-Implanted c-Silicon

Szekeres, AnnaAlexandrova, SashkaAnastasescu, MihaiStroescu, HermineGartner, MariucaPetrik, Péter2025-01-152025-01-152024Micro. -4 : 3 (2024), p. 426-441. -Micro. - 2673-80232673-8023https://hdl.handle.net/2437/385295Optical and Morphological Characterization of Nanoscale Oxides Grown in Low-Energy H+-Implanted c-Siliconfolyóiratcikkopen access articlehttps://ebib.lib.unideb.hu/ebib/CorvinaWeb?action=cclfind&resultview=long&ccltext=idno+BIBFORM126758TermészettudományokFizikai tudományokhttps://www.mdpi.com/2673-8023/4/3/27Szerzőhttp://dx.doi.org/10.3390/micro40300272025-01-1500132707460000185205112631