Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry
dc.contributor.author | Lohner, Tivadar | |
dc.contributor.author | Németh, Attila | |
dc.contributor.author | Zolnai, Zsolt | |
dc.contributor.author | Kalas, Benjámin | |
dc.contributor.author | Romanenko, Alekszej | |
dc.contributor.author | Khánh, Nguyen Quoc | |
dc.contributor.author | Szilágyi, Edit | |
dc.contributor.author | Kótai, Endre | |
dc.contributor.author | Agócs, Emil | |
dc.contributor.author | Tóth, Zsolt | |
dc.contributor.author | Budai, Judit | |
dc.contributor.author | Petrik, Péter | |
dc.contributor.author | Fried, Miklós | |
dc.contributor.author | Bársony, István | |
dc.contributor.author | Gyulai, József | |
dc.date.accessioned | 2024-03-28T09:26:55Z | |
dc.date.available | 2024-03-28T09:26:55Z | |
dc.date.issued | 2022 | |
dc.date.oa | 2024-04-04 | |
dc.date.pasync | 2024-04-09T23:08:53Z | |
dc.date.updated | 2024-03-28T09:26:55Z | |
dc.description.corrector | SZKM | |
dc.identifier.citation | Materials Science In Semiconductor Processing. -152 (2022), p. 1-11. -Mater. Sci. Semicond. Process. - 1369-8001 | |
dc.identifier.doi | http://dx.doi.org/10.1016/j.mssp.2022.107062 | |
dc.identifier.issn | 1369-8001 | |
dc.identifier.opac | https://ebib.lib.unideb.hu/ebib/CorvinaWeb?action=cclfind&resultview=long&ccltext=idno+BIBFORM119917 | |
dc.identifier.scopus | 85137065154 | |
dc.identifier.uri | https://hdl.handle.net/2437/368005 | |
dc.identifier.url | https://linkinghub.elsevier.com/retrieve/pii/S1369800122005893 | |
dc.identifier.wos | 000860756600004 | |
dc.language | eng | |
dc.rights.access | open access article | |
dc.rights.owner | Szerző | |
dc.subject.mab | Természettudományok | |
dc.subject.mab | Fizikai tudományok | |
dc.title | Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry | |
dc.type | folyóiratcikk | |
dc.type | idegen nyelvű folyóiratközlemény külföldi lapban |
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